| Autor: |
Tomoyasu Takusagawa, Tomoyasu Takusagawa, Noriaki Yamada, Noriaki Yamada, Terumasa Kato, Terumasa Kato, Hajime Hattori, Hajime Hattori, Teruyuki Matsui, Teruyuki Matsui |
| Zdroj: |
Japanese Journal of Applied Physics; September 1994, Vol. 33 Issue: 9 p5151-5151, 1p |
| Abstrakt: |
In the preparation of Pb(Zr,Ti)O3thin films by the sol-gel technique, the following procedures are involved: evaporation of solvents, thermal decomposition of organometallic compounds and crystallization. In this study, a thermodynamic approach was employed for the sol-gel technique, and the processing conditions were determined. For the processes of evaporation and thermal decomposition, the processing conditions were determined by applying Ozawa's method [Bull. Chem. Soc. Jpn. 38 (1965) 1881]. By means of both the X-ray diffraction technique and scanning electron microscope technique, crystal structure and surface morphology were evaluated. It was observed that the perovskite phase began to form at 500° C and was completed at 600° C. Moreover, a dense Pb(Zr,Ti)O3thin film was also formed by annealing at 700° C for 120 min. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
|
