From Relaxed GeSi Buffers to Field Effect Transistors: Current Status and Future Prospects

Autor: Xie, Ya-Hong, Fitzgerald, Eugene A., Monroe, Donald, G. Patrick Watson, G. Patrick Watson, Paul J. Silverman, Paul J. Silverman
Zdroj: Japanese Journal of Applied Physics; April 1994, Vol. 33 Issue: 4 p2372-2372, 1p
Abstrakt: We review the current status of relaxed GeSi buffer layers, high-mobility two-dimensional electron and hole gases fabricated on top of these layers, and GeSi-based field effect transistors (FETs). Recent progress in these fields is emphasized. A brief summary is then given for a variety of GeSi-based FET fabrications to date. Finally, the future prospects of GeSi-based FETs to be integrated into Si VLSI production is discussed.
Databáze: Supplemental Index