| Autor: |
Tahara, Hirokazu, Abe, Tomoyuki, Tsubaki, Toshiyuki, Kagaya, Yoichi, Tsubakishita, Yasuji, Yoshikawa, Takao, Kuwata, Masayasu, Ueda, Yasutoshi |
| Zdroj: |
Japanese Journal of Applied Physics; November 1993, Vol. 32 Issue: 11 p5122-5122, 1p |
| Abstrakt: |
For applications of quasi-steady magneto-plasma-dynamic (MPD) arcjets to material processing, an MPD arcjet with a cathode covered with ceramic materials was developed. In 100-shot operations at 5-10 kA, the ablation rates of the ceramic covers ranged from 2.5 to 5.0 mg/shot. The front velocities of ablated Al atoms inferred with a streak camera were much higher than velocities of 200-500 m/s for conventional plasma torches for material processing. This is effective for deposition of rigid films adhering strongly to substrate surfaces. The SEM photographs showed that a dense uniform film was deposited near the center of the substrate. From the XPS spectra, the peak area ratio of Ti/Al for the coating film almost equaled that for the cross section, and the valence numbers of Al and Ti did not change. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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