A New Pupil Filter for Annular Illumination in Optical Lithography
| Autor: | Hiroshi Fukuda, Hiroshi Fukuda, Ryoko Yamanaka, Ryoko Yamanaka |
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| Zdroj: | Japanese Journal of Applied Physics; December 1992, Vol. 31 Issue: 12 p4126-4126, 1p |
| Abstrakt: | Several super-resolution photolithography techniques are investigated. In annular illumination, both the resolution and depth of focus (DOF) are enhanced most effectively when 0.6 |
| Databáze: | Supplemental Index |
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