Improvement of Organometallic Vapor Phase Epitaxy Regrown GaInAs/InP Heterointerface by Surface Treatment

Autor: Suemasu, Takashi, Yasuyuki Miyamoto, Yasuyuki Miyamoto, Kazuhito Furuya, Kazuhito Furuya
Zdroj: Japanese Journal of Applied Physics; October 1991, Vol. 30 Issue: 10 pL1702-L1702, 1p
Abstrakt: It is shown that the combined surface treatment of a (NH4)2Sxtreatment and preheating improves the regrown heterointerface of n-GaInAs/i-InP in organometallic vapor phase epitaxy (OMVPE). Properties of the regrown heterointerface were evaluated from voltage-current (V-I) characteristics of the n-GaInAs/i-InP/n-GaInAs tunneling diode. This surface treatment is useful for the fabrication of ultrafine-size structures of quantum-wire, -box and electron wave devices.
Databáze: Supplemental Index