| Autor: |
Kizaki, Yoshimi, Taguchi, Toshiyuki, Yamazaki, Satoshi |
| Zdroj: |
Japanese Journal of Applied Physics; August 1990, Vol. 29 Issue: 8 p1561-1561, 1p |
| Abstrakt: |
The controllability of the chemical composition of acrylic compounds was investigated in ultrathin polymerized films by using a polymerization process in vacuowith a vacuum UV excimer laser. Four different acrylic compounds were polymerized by this process. The analysis of X-ray photoelectron spectroscopy showed that the chemical compositions of polymer film from ethylacrylate were well-preserved monomer compositions. The insulation characteristics of the ultrathin films obtained from the optimized conditions were found to be sufficient for producing a MIS device on n-type GaAs substrates. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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