| Autor: |
Shoyama, Hiroaki, Mi\usina, Martin, Shoji Miyake, Shoji Miyake |
| Zdroj: |
Japanese Journal of Applied Physics; July 1997, Vol. 36 Issue: 7 p4583-4583, 1p |
| Abstrakt: |
The characterization of electron cyclotron resonance (ECR) plasma with a hollow cathode target for sputtering has been performed with a Langmuir probe. The experiments were carried out at low pressures below 1.2×10-3Pa at which high ionization rates over 10% were obtained. An ion current density up to 10 mA cm-2and a target current up to 700 mA were achieved when the input microwave power was 200 W. It was found that a negative bias applied to the target causes significant changes in the spatial distributions of electron density, electron temperature and plasma potential. When a negative bias over a certain value was applied, intense coherent temporal fluctuations in the ion saturation current were observed around the radial center of the plasma column. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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