| Autor: |
Koichi Sasaki, Koichi Sasaki, Kenichiro Ura, Kenichiro Ura, Kazunari Suzuki, Kazunari Suzuki, Kiyoshi Kadota, Kiyoshi Kadota |
| Zdroj: |
Japanese Journal of Applied Physics; March 1997, Vol. 36 Issue: 3 p1282-1282, 1p |
| Abstrakt: |
The composition of positive ions was investigated using a time-of-flight mass spectrometer in high-density CF4and C4F8helicon plasmas. For low (ne<1 ×1012cm-3) electron densities, the dominant positive ions were CF3+and CF+in the CF4and C4F8plasmas, respectively, while for high (ne>8 ×1012cm-3) electron densities, the dominant positive ions were C+and F+in both the CF4and C4F8plasmas. However, the C+/F+ion current ratio was higher in the C4F8plasma than the CF4plasma. The reaction kinetics of positive ions is discussed based on the electron density dependence of the mass spectral intensities. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
|
