B, Sb and Si Liquid Metal Alloy Ion Sources for Submicron Fabrication

Autor: Gamo, Kenji, Inomoto, Yasumasa, Ochiai, Yukinori, Namba, Susumu
Zdroj: Japanese Journal of Applied Physics; January 1982, Vol. 21 Issue: 1 p415-415, 1p
Abstrakt: B, Sb and Si liquid metal alloy ion sources have been fabricated and basic characteristics such as current-voltage relations, angular current intensity, energy distribution and mass spectra have been measured. Characteristics of ion beam focusing systems are also discussed. It was observed that the energy distribution width (FWHM) of various ion species obtained for Sb alloy sources decrease with increasing the charge to mass ratio of the ion beam. It was also observed that the mass spectra varied slightly with a total ion source current. These ion sources could be operated for more than 10 h without any change in mass spectra.
Databáze: Supplemental Index