| Autor: |
Onaka, Takashi, Kamijo, Fumio |
| Zdroj: |
Japanese Journal of Applied Physics; April 1977, Vol. 16 Issue: 4 p559-559, 1p |
| Abstrakt: |
Sputtering processes of high-energy incident ions are calculated numerically by using the Monte Carlo method under the assumptions of random arrangement and no inelastic collisions. In the high-energy region, the unscreened Coulomb potential is used, while the hard-sphere type is adopted in the low-energy region. The simulation has been performed for the bombardment by deuterons with energies of 20 keV to l MeV on a silver target. The calculated sputtering ratios agree well with the experimental values. On the basis of these results a new formula for the sputtering ratio is derived by modifying Pease's formula. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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