Detection and correlation of yield loss induced by color resist deposition deviation with a deep learning approach applied to optical acquisitions
| Autor: | Adan, Ofer, Robinson, John C., Alcaire, Thomas, Le Cunff, Delphine, Tortai, Jean-Hervé, Soulan, Sebastien, Gredy, Victor, Templier, Maxime, Kessar, Mehdi, Bianchini, Raffaele, Berthoud, Audrey |
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| Zdroj: | Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116112G-116112G-9, 1045018p |
| Databáze: | Supplemental Index |
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