Contour-based metrology for assessment of edge placement error and its decomposition into global/local CD uniformity and LELE intralayer overlay
| Autor: | Adan, Ofer, Robinson, John C., Zhou, Wenzhan, Wei, Fang, Zhang, Yu, Zhu, Jun, Hu, Chan-Yuan, Cho, Kyoyeon, Corradi, Antonio, Pao, Kuo-Feng, Jain, Vivek, Elmalk, Abdalmohsen, Raghunathan, Sudharshanan, Hunsche, Stefan, Zhu, Robbin, Chen, Selena, Lin, Luke, Liang, Leon, Liu, Lei |
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| Zdroj: | Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116111Y-116111Y-8, 1045008p |
| Databáze: | Supplemental Index |
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