Fast in-device overlay metrology on multi-tier 3DNAND devices without DECAP and its applications in process characterization and control
| Autor: | Adan, Ofer, Robinson, John C., Feng, Yaobin, Xuan, Pandeng, Wu, Dean, Yang, Bruce, Xu, Craig, Liu, Neo, Izikson, Pavel, You, Huanian, Yan, Xi-Zhi, Markov, Vladimir, Chai, Yvon, Chen, Chaoyu, Verstraeten, Bert, Wang, Amy, Sanguinetti, Gonzalo, Miceli, Giacomo, Boter, Jelmer, Van der Meijden, Vidar, Li, Hua, Mozooni, Babak |
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| Zdroj: | Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116110V-116110V-6, 1044997p |
| Databáze: | Supplemental Index |
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