X-ray critical dimension metrology solution for high aspect ratio semiconductor structures
| Autor: | Adan, Ofer, Robinson, John C., Wormington, Matthew, Ginsburg, Adam, Reichental, Israel, Dikopoltsev, Alex, Krokhmal, Alex, Vinshtein, Yuri, Ryan, Paul, Korlahalli, Rahul, Wong, Franklin, Rabello, Silvio, Song, Yang, Li, Jie |
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| Zdroj: | Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116110W-116110W-10, 11494901p |
| Databáze: | Supplemental Index |
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