Machine learning for Tool Induced Shift (TIS) reduction: an HVM case study
| Autor: | Adan, Ofer, Robinson, John C., Ophir, Boaz, Shusterman, Udi, Golotsvan, Anna, Kato, Cindy, Hayashi, Masanobu, Kato, Richika, Goto, Tomohiro, Kuriyama, Taketo, Miyake, Manabu, Takeuchi, Yasuki, Mizuochi, Hiroyuki |
|---|---|
| Zdroj: | Proceedings of SPIE; February 2021, Vol. 11611 Issue: 1 p116110E-116110E-7, 1044998p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|