Parametric modeling of patterned object with variations and expert tuning of edge placement
| Autor: | Bannister, Julie, Mohanty, Nihar, Darbon, B., Grould, M., Clément, N., Baderot, J., Martinez, S., Foucher, J. |
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| Zdroj: | Proceedings of SPIE; March 2021, Vol. 11615 Issue: 1 p116150K-116150K-6, 1045357p |
| Databáze: | Supplemental Index |
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