Determination of linewidth for metal/oxide gratings by measured diffraction efficiency in several orders
| Autor: | Sheng, Yunlong, Zhou, Changhe, Cao, Liangcai, Belousov, Dmitrij A., Korolkov, Victor P., Shimansky, Ruslan V., Khomutov, Vladimir N., Kuts, Roman I. |
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| Zdroj: | Proceedings of SPIE; October 2020, Vol. 11551 Issue: 1 p115511N-115511N-7, 1039607p |
| Databáze: | Supplemental Index |
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