A high dynamic range MOEMS accelerometer based on multi-order diffraction method
| Autor: | Zhang, Xuping, Li, Baojun, Yu, Changyuan, Zhang, Xinliang, Yao, Yuan, Pan, Debin, Guo, Jie, Zhao, Yuan, Dong, Tingting, Wang, Jianbo |
|---|---|
| Zdroj: | Proceedings of SPIE; October 2020, Vol. 11547 Issue: 1 p115471F-115471F-9, 1039249p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|