Autor: |
Götz, M., Thieme, P., Blüthner, K., Krech, W., Born, D., Götz, S., Fuchs, H.-J., Kley, E.-B., Wagner, Th., Eska, G., Götz, M., Thieme, P., Blüthner, K., Krech, W., Born, D., Götz, S., Fuchs, H.-J., Kley, E.-B., Wagner, Th., Eska, G. |
Zdroj: |
Journal de Physique IV - Proceedings; September 1994, Vol. 4 Issue: 1 pC6-223-C6-228, 2236223p |
Abstrakt: |
We have demonstrated the suitability of a self-aligned in-line (SAIL) technique for the preparation of ultra-small high-ohmic tunnel junctions as required for the investigation of single-charge tunneling phenomena. The Coulomb blockade has been observed at 14mK by means of a series array of five Al/AlOx/Al tunnel junctions operated in the normal-conducting state. We have applied this conception to the fabrication of single junctions in a Nb/NbOx/PbAuIn system as well. At 4.2K these samples show the typical I-V behaviour of Josephson tunnel junctions as expected. The compatibility of this process with several thin film deposition techniques, evaporation as well as sputtering, extremely small parasitic capacitances and excellent integrability promise interesting applications in both single-charge electronics and Josephson physics. |
Databáze: |
Supplemental Index |
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