MOCVD of High Quality YBa2Cu3O7-δThin Films Using Novel Fluorinated and Non-Fluorinated Precursors

Autor: Richads, B. C., Cook, S. L., Pinch, D. L., Andrews, G. W., Richads, B. C., Cook, S. L., Pinch, D. L., Andrews, G. W.
Zdroj: Journal de Physique IV - Proceedings; June 1995, Vol. 5 Issue: 1 pC5-407-C5-414, 4075410p
Abstrakt: The first high quality, YBa2Cu3O7-δthin films have been produced by MOCVD using the novel fluorinated and non-fluorinated precursors, [Ba(TDFND)2.tetraglyme]1, [Cu(TDFND)2and [Y(TMHD)3.4-'BuPyNO]2and the traditional β-diketonate complexes [Y(TMHD)3]3and[Cu(TMHD)2]. The novel precursors are thermally stable and highly volatine. Their low melting points, < 100°C, offer the advantage that they are liquid at the temperature of use. The removal of fluorine is effected by in situ water treatment. For films deposited on SrTiO3the composition and surface morphology has been shown to be uniform over a 20 mm radius. The c axis orientation of the films has been confirmed by X-ray Diffraction and Rocking Curve Analysis. AC susceptibility has been used to show typical films possess a critical temperature, Tc> 90 K and critical current density, Jc> 106Acm-2at 77K. Fluorine content ≈ 100 ppm has been determined by SIMS.
Databáze: Supplemental Index