Defect mitigation of chemo-epitaxy DSA patterns
| Autor: | Gronheid, Roel, Sanders, Daniel P., Muramatsu, Makoto, Nishi, Takanori, Ido, Yasuyuki, Kitano, Takahiro |
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| Zdroj: | Proceedings of SPIE; May 2020, Vol. 11326 Issue: 1 p113260Y-113260Y-8, 1019349p |
| Databáze: | Supplemental Index |
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