A DOE study of plasma etched microlens shape for CMOS image sensors
| Autor: | Gronheid, Roel, Sanders, Daniel P., Ristoiu, Delia, Leverd, François, Mortini, Etienne, Huguenin, Jean-Luc |
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| Zdroj: | Proceedings of SPIE; May 2020, Vol. 11326 Issue: 1 p113260O-113260O-9, 1019350p |
| Databáze: | Supplemental Index |
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