A trainable die-to-database for fast e-Beam inspection: learning normal images to detect defects
| Autor: | Adan, Ofer, Robinson, John C., Ouchi, Masanori, Ishikawa, Masayoshi, Shinoda, Shinichi, Toyoda, Yasutaka, Yumiba, Ryo, Shindo, Hiroyuki, Izawa, Masayuki |
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| Zdroj: | Proceedings of SPIE; March 2020, Vol. 11325 Issue: 1 p113252F-113252F-9, 1019278p |
| Databáze: | Supplemental Index |
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