3D-NAND wafer process monitoring using high voltage SEM with auto e-beam tilt technology
| Autor: | Adan, Ofer, Robinson, John C., Tu, Leeming, Mi, Jian, Fan, Henry, Zhou, Haydn, Xiong, Felix, Tu, Louis, Chen, Gangyi, Shao, Chuanyu, Zhang, Long, Kubo, Shinji |
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| Zdroj: | Proceedings of SPIE; March 2020, Vol. 11325 Issue: 1 p113250L-113250L-8, 1019259p |
| Databáze: | Supplemental Index |
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