Optical defect inspection solution for EUV stochastics detection

Autor: Felix, Nelson M., Lio, Anna, Anantha, Vidyasagar, Babulnath, Raghav, Kannan, Veikunth, Sharma, Garima, Kumar, Shubham, Sah, Kaushik, Cross, Andrew, Lakhawat, Rahul, Pathangi, Hari, De Bisschop, Peter
Zdroj: Proceedings of SPIE; March 2020, Vol. 11323 Issue: 1 p113231J-113231J-6, 1019086p
Databáze: Supplemental Index