Hot-wire CVD hydrogenated amorphous silicon for multi-layer photonic applications
| Autor: | Reed, Graham T., Knights, Andrew P., Chong, Harold M. H., Oo, Swe Z., Petra, Rafidah, Tarazona, Antulio, Mittal, Vinita, Peacock, Anna C., Reed, Graham T. |
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| Zdroj: | Proceedings of SPIE; March 2020, Vol. 11285 Issue: 1 p112850Y-112850Y-6, 1015657p |
| Databáze: | Supplemental Index |
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