| Autor: |
Xenidou, Theodora C., Prud, Nathalie, Vahlas, Constantin, Markatos, Nicholas C., Boudouvis, Andreas G. |
| Zdroj: |
ECS Transactions; September 2009, Vol. 25 Issue: 8 p99-106, 8p |
| Abstrakt: |
Growth experiments and reactive transport modeling were combined to formulate a comprehensive predictive model for aluminum growth from dimethylethylamine alane. The growth-rate profile was experimentally investigated as a function of substrate temperature. The reactive transport model, built under the computational fluid dynamics software PHOENICS, was used to reproduce the experimental measurements and to contribute to the understanding of the aluminum growth process, under sub-atmospheric pressure conditions. The growth mechanism of aluminum films was based on well established in literature reaction order and activation energy of homogeneous and heterogeneous chemical reactions. The reactive transport model was used further to investigate the effect of some key operating parameters on the process output. Simulation results are suggestive of modifications in the operating parameters that could enhance the growth rate and the spatial uniformity of the film thickness. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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