| Autor: |
Beckhoff, Burkhard, Nutsch, Andreas, Altmann, Roswitha, Borionetti, Gabriella, Luisa, Maria, Codegoni, Davide, Grasso, Salvatore, Cazzini, Elena, Bersani, Massimo, Gennaro, Salvatore, Kolbe, Michael, Mueller, Matthias, Kregsamer, Peter, Posch, Florian |
| Zdroj: |
ECS Transactions; September 2009, Vol. 25 Issue: 3 p311-323, 13p |
| Abstrakt: |
The European Integrated Activity of Excellence and Networking for Nano- and Micro-Electronics Analysis (ANNA), www.ANNA-i3.net, addresses the development and assessment of new methodologies and metrologies for the detection of low concentration inorganic contaminants on and in silicon as well as for novel materials. The comparison of various analytical techniques available to the participating partners is important for assessment of both instrumentation and quantification reliability. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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