| Autor: |
Darbari, Sara, Abdi, Yaser, Ebrahimi, Aida, Doostani, Narges, Mohajerzadeh, Shamsoddin |
| Zdroj: |
ECS Transactions; October 2011, Vol. 35 Issue: 30 p131-135, 5p |
| Abstrakt: |
A novel interdigital sensor and actuator device based on branched carbon nanotubes (B-CNTs) on silicon-based membranes with a high capacitance value is reported. The presence of B-CNTs leads to a high overlap between interdigital (ID) fingers and the resulted capacitance value. The formation of a sensor/actuator system is based on ID patterns on silicon-based membranes, and the branched carbon nano-structures have been grown selectively on the electrodes. The actuation behavior of the device has been investigated in a SAW-like sensor and actuator device which has been placed on a flexible membrane. |
| Databáze: |
Supplemental Index |
| Externí odkaz: |
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