A CMOS Compatible, Forming Free TaOx ReRAM

Autor: Lohn, Andrew J, Stevens, James E, Mickel, Patrick R, Hughart, David R, Marinella, Matthew J.
Zdroj: ECS Transactions; August 2013, Vol. 58 Issue: 5 p59-65, 7p
Abstrakt: Resistive random access memory (ReRAM) has become a promising candidate for next-generation high-performance non-volatile memory that operates by electrically tuning resistance states via modulating vacancy concentrations. We demonstrate a wafer-scale process for resistive switching in tantalum oxide that is completely CMOS compatible. The resulting devices are forming-free and with greater than 1x105 cycle endurance.
Databáze: Supplemental Index