Optical inspection of noncooperative copper surface structures using multi- and hyperspectral acquisition systems
Autor: | Beyerer, Jürgen, Puente León, Fernando, Wrieden, Markus, Breitbarth, Andreas, Zimmermann, Manuel, Schambach, Jörg, Rosenberger, Maik, Notni, Gunther |
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Zdroj: | Proceedings of SPIE; June 2019, Vol. 11061 Issue: 1 p1106106-1106106-11 |
Databáze: | Supplemental Index |
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