Optical inspection of noncooperative copper surface structures using multi- and hyperspectral acquisition systems

Autor: Beyerer, Jürgen, Puente León, Fernando, Wrieden, Markus, Breitbarth, Andreas, Zimmermann, Manuel, Schambach, Jörg, Rosenberger, Maik, Notni, Gunther
Zdroj: Proceedings of SPIE; June 2019, Vol. 11061 Issue: 1 p1106106-1106106-11
Databáze: Supplemental Index