Nanostructuring of PMMA, GaAs, SiC and Si samples by focused XUV laser beam
| Autor: | Juha, Libor, Bajt, Saša, Guizard, Stéphane, Frolov, A., Kolacek, K., Schmidt, J., Straus, J., Choukourov, A. |
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| Zdroj: | Proceedings of SPIE; April 2019, Vol. 11035 Issue: 1 p110350K-110350K-6, 993157p |
| Databáze: | Supplemental Index |
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