Challenges in size scale up of freeform polishing processes
| Autor: | Poisl, W. Howard, Ferralli, Ian, Brunelle, Matt, Coniglio, Jen, Myer, Brian, Lynch, Tim, Blalock, Todd, DeGroote Nelson, Jessica |
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| Zdroj: | Proceedings of SPIE; May 2019, Vol. 10985 Issue: 1 p109850I-109850I-12, 10875163p |
| Databáze: | Supplemental Index |
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