Analysis and modelling of patterned wafer nano-topography using multiple linear regression on design GDS and silicon PWG data
| Autor: | Ukraintsev, Vladimir A., Adan, Ofer, Kessar, M., Le-Gratiet, B., Lemaire, P., Brouzet, V., Le Cunff, D., Gredy, V. |
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| Zdroj: | Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109592Q-109592Q-8, 986337p |
| Databáze: | Supplemental Index |
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