Optical characterization of multi-NST nanowire test structures using Mueller matrix spectroscopic ellipsometry (MMSE) based scatterometry for sub 5nm nodes
| Autor: | Ukraintsev, Vladimir A., Adan, Ofer, Korde, Madhulika, Kal, Subhadeep, Pereira, Cheryl, Keller, Nick, Mosden, Aelan, Diebold, Alain C. |
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| Zdroj: | Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109590X-109590X-12, 10849423p |
| Databáze: | Supplemental Index |
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