Laser induced crystal defects in monocrystalline silicon
| Autor: | Makimura, Tetsuya, Račiukaitis, Gediminas, Molpeceres, Carlos, Menold, T., Lanoy, F., Ametowobla, M., Hinderberger, S., Ohmer, K., Köhler, J. R., Werner, J. H. |
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| Zdroj: | Proceedings of SPIE; March 2019, Vol. 10905 Issue: 1 p109050X-109050X-9, 981460p |
| Databáze: | Supplemental Index |
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