Fabrication of anti-reflection coating TiO2-SiO2on silicon substrate with pulsed laser deposition method

Autor: Nasution, Aulia M. T., Hatta, Agus M., Nelwan, Eframoktora R. G., Suliyanti, Maria M., Prastomo, Niki
Zdroj: Proceedings of SPIE; April 2019, Vol. 11044 Issue: 1 p110440N-110440N-6, 993967p
Databáze: Supplemental Index