Fabrication of anti-reflection coating TiO2-SiO2on silicon substrate with pulsed laser deposition method
Autor: | Nasution, Aulia M. T., Hatta, Agus M., Nelwan, Eframoktora R. G., Suliyanti, Maria M., Prastomo, Niki |
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Zdroj: | Proceedings of SPIE; April 2019, Vol. 11044 Issue: 1 p110440N-110440N-6, 993967p |
Databáze: | Supplemental Index |
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