Achieving diffraction-limited performance on the Berkeley MET5

Autor: Goldberg, Kenneth A., Miyakawa, Ryan, Anderson, Chris, Zhu, Wenhua, Gaines, Geoff, Gamsby, Jeff, Cork, Carl, Jones, Gideon, Dickenson, Michael, Rekawa, Seno, Chao, Weilun, Oh, Sharon, Naulleau, Patrick
Zdroj: Proceedings of SPIE; March 2019, Vol. 10957 Issue: 1 p109571X-109571X-7, 986147p
Databáze: Supplemental Index