Actinic inband EUV reflectometry AIMER compared to ALS blank qualification and applied to structured masks
| Autor: | Goldberg, Kenneth A., Biermanns-Föth, A., Phiesel, C., Missalla, T., Arps, J., Piel, C., Lebert, R. |
|---|---|
| Zdroj: | Proceedings of SPIE; March 2019, Vol. 10957 Issue: 1 p109571G-109571G-9, 986149p |
| Databáze: | Supplemental Index |
| Externí odkaz: |
|