Research of the microelectromechanical switch with different materials of metal membrane
| Autor: | Lukichev, Vladimir F., Rudenko, Konstantin V., Lysenko, Igor E., Tkachenko, Alexey V., Ezhova, Olga A. |
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| Zdroj: | Proceedings of SPIE; March 2019, Vol. 11022 Issue: 1 p110220Q-110220Q-12, 10911793p |
| Databáze: | Supplemental Index |
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