Key components development progress of high-power LPP-EUV light source with unique debris mitigation system using a magnetic field
| Autor: | Ronse, Kurt G., Hendrickx, Eric, Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Nishimura, Yuichi, Hori, Tsukasa, Yabu, Takayuki, Wakana, Katsuhiko, Ueno, Yoshifumi, Soumagne, Georg, Nagai, Shinji, Yanagida, Tatsuya, Kawasuji, Yasufumi, Shiraishi, Yutaka, Abe, Tamotsu, Nakarai, Hiroaki, Saito, Takashi, Mizoguchi, Hakaru |
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| Zdroj: | Proceedings of SPIE; October 2018, Vol. 10809 Issue: 1 p108091M-108091M-11, 10701021p |
| Databáze: | Supplemental Index |
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