EUV pupil optimization for 32nm pitch logic structures
| Autor: | Ronse, Kurt G., Hendrickx, Eric, Naulleau, Patrick P., Gargini, Paolo A., Itani, Toshiro, Rio, D., Blanco, V., Franke, J.-H., Gillijns, W., Dusa, M., De Poortere, E., Van Adrichem, P., Lyakhova, K., Spence, C., Hendrickx, E., Biesemans, S., Nafus, K. |
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| Zdroj: | Proceedings of SPIE; October 2018, Vol. 10809 Issue: 1 p108090N-108090N-14, 10700925p |
| Databáze: | Supplemental Index |
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