Magnetostrictively deforming the surface of a silicon wafer at two locations
| Autor: | Spiga, Daniele, Mimura, Hidekazu, Ulmer, M. P., Coppejans, R., Khreishi, M. A., Keely, K., Buchholz, D. B., Shiri, R., Rodriguez, L. A., O'Donnell, A. E., Schonfeld, Z. J., Reinhardt, W. H., Borgsmiller, L. E., Baturalp, T. B., Coverstone, V. L., Cao, J. |
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| Zdroj: | Proceedings of SPIE; September 2018, Vol. 10761 Issue: 1 p107610B-107610B-9, 968500p |
| Databáze: | Supplemental Index |
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