1.2 kV 4H-SiC Split-Gate Power MOSFET: Analysis and Experimental Results

Autor: Han, Ki Jeong, Baliga, B. Jayant, Sung, Woong Je
Zdroj: Materials Science Forum; June 2018, Vol. 924 Issue: 1 p684-688, 5p
Abstrakt: This paper presents a 1.2kV-rated 4H-SiC Split-Gate power MOSFET (SG-MOSFET) with superior high frequency figures-of-merit (HF-FOM). Electrical characteristics including reverse transfer capacitance and gate-to-drain charge are measured from fabricated devices on a 6-inch SiC wafer, demonstrating excellent performance. Compared to the conventional MOSFETs, the SG-MOSFET provides about 7x smaller HF-FOM [RonxCgd] and 2x smaller HF-FOM [RonxQgd] with improved reverse transfer capacitance and gate-to-drain charge.
Databáze: Supplemental Index