Hybrid laser 3D microprocessing in glass/polymer micromechanical sensor: towards chemical sensing applications
| Autor: | Herkommer, Alois M., von Freymann, Georg, Flury, Manuel, Tičkūnas, Titas, Malinauskas, Mangirdas, Gadonas, Roaldas, Bellouard, Yves, Paipulas, Domas |
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| Zdroj: | Proceedings of SPIE; May 2018, Vol. 10675 Issue: 1 p106750C-106750C-7, 960758p |
| Databáze: | Supplemental Index |
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