Characterization of metal line-width variation in via first dual-damascene approach and its modeling using machine learning artificial neural network algorithms
| Autor: | Cain, Jason P., Yuan, Chi-Min, Cantù, Pietro, Catarisano, Chiara, Corneo, Nicoletta, Dundulachi, Alessandro, Litterio, Emma, Mantovani, Valeria, Patelmo, Matteo, Triulzi, Benedetta |
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| Zdroj: | Proceedings of SPIE; March 2018, Vol. 10588 Issue: 1 p105880S-105880S-11, 10482132p |
| Databáze: | Supplemental Index |
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