Reduction in overlay error from mark asymmetry using simulation, ORION, and alignment models
Autor: | Kye, Jongwook, Owa, Soichi, Menchtchikov, Boris, Socha, Robert, Zheng, Chumeng, Raghunathan, Sudhar, Aarts, Igor, Shome, Krishanu, Lee, Jonathan, de Ruiter, Chris, Rijpstra, Manouk, Megens, Henry, Brinkhof, Ralph, Teeuwisse, Floris, Karssemeijer, Leendertjan, Lyulina, Irina, Li, Chung-Tien, Hermans, Jan, Leray, Philippe |
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Zdroj: | Proceedings of SPIE; March 2018, Vol. 10587 Issue: 1 p105870C-105870C-10, 10481141p |
Databáze: | Supplemental Index |
Externí odkaz: |