Line edge roughness reduction for 7nm metals
| Autor: | Kye, Jongwook, Owa, Soichi, Chen, Zheng, McDermott, Steven, Ordonio, Christopher, Chen, Ao, Morgenfeld, Bradley, Han, Geng |
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| Zdroj: | Proceedings of SPIE; March 2018, Vol. 10587 Issue: 1 p1058708-1058708-7 |
| Databáze: | Supplemental Index |
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