Overlay control for 7nm technology node and beyond

Autor: Kye, Jongwook, Owa, Soichi, Aung, Nyan, Chung, Woong Jae, Samudrala, Pavan, Gao, Haiyong, Gao, Wenle, Brown, Darius, He, Guanchen, Park, Bono, Hsieh, Michael, Hao, Xueli, Chen, Yen-Jen, Zhou, Yue, Park, DeNeil, Gutjahr, Karsten, Krumanocker, Ian, Jock, Kevin, Gomez, Juan Manuel
Zdroj: Proceedings of SPIE; March 2018, Vol. 10587 Issue: 1 p105870A-105870A-12, 10481143p
Databáze: Supplemental Index