Development of new polyphenols applied to spin-on carbon hardmask with characteristics of high-heat resistance and good planarization
| Autor: | Hohle, Christoph K., Gronheid, Roel, Horiuchi, Junya, Takigawa, Tomoaki, Shimizu, Yoko, Makinoshima, Takashi, Sato, Takashi, Echigo, Masatoshi |
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| Zdroj: | Proceedings of SPIE; March 2018, Vol. 10586 Issue: 1 p105861K-105861K-11, 10480251p |
| Databáze: | Supplemental Index |
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